Diffusion Mourning Report 11/01/02

Ted Berg tberg at snf.stanford.edu
Fri Nov 1 06:51:14 PST 2002

Here you go,
Tylan 4 saga continues. LTO back to the way it was.  Burn box down again
for cleaning.

Date: 11/1/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 yellow TCA Investigation
Tylan 2 Up
Tylan 3 yellow TCA Investigation
Tylan 4 Down pull and clean completed-TCA Clean completed- Testing
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up TCA Investigation
Tylan 8-SiGe up  6.3/?
Tylan 9-Poly Up  24.9/30
Tylan 10-Nitride Up  26.6/30
Tylan 11-BPSG-LTO yellow Ran Uniformity test yesterday- 7.48/30
Tylan 12-FGA Up
Tystar Up  6.75/30???
Doped Poly Down
TEOS yellow  testing again
Tylan 16 N/A
Burn Box Down cleaning again this morning


SiH4 for furnaces   Change at 100PSI  Currently @ 600 PSI

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