Diffusion Morning Report 11/04/02
tberg at snf.stanford.edu
Mon Nov 4 07:00:23 PST 2002
Good Morning all,
Tylan 4's uniformity is back to normal, Nitride is going down at Noon
today it is over 30 microns, Poly is close behind at 26 microns. Burn
box being cleaned this morning.
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 yellow TCA Investigation
Tylan 2 Up
Tylan 3 yellow TCA Investigation
Tylan 4 Down Testing
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up TCA Investigation
Tylan 8-SiGe up 6.3/?
Tylan 9-Poly Up 26.4/30
Tylan 10-Nitride Up 30.02/30 Going down for clean at noon.
Tylan 11-BPSG-LTO yellow 10.75/30
Tylan 12-FGA Up
Tystar Up 6.75/30???
Doped Poly Down
TEOS yellow testing again
Tylan 16 N/A
Burn Box Down cleaning again this morning
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces Change at 100PSI Currently @ 590 PSI
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