Diffusion Morning Report 11/04/02

Ted Berg tberg at snf.stanford.edu
Mon Nov 4 07:00:23 PST 2002

Good Morning all,

Tylan 4's uniformity is back to normal, Nitride is going down at Noon
today it is over 30 microns, Poly is close behind at 26 microns.   Burn
box being cleaned this morning.

Date: 11/4/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 yellow TCA Investigation
Tylan 2 Up
Tylan 3 yellow TCA Investigation
Tylan 4 Down  Testing
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up TCA Investigation
Tylan 8-SiGe up  6.3/?
Tylan 9-Poly Up  26.4/30
Tylan 10-Nitride Up  30.02/30  Going down for clean at noon.
Tylan 11-BPSG-LTO yellow  10.75/30
Tylan 12-FGA Up
Tystar Up  6.75/30???
Doped Poly Down
TEOS yellow  testing again
Tylan 16 N/A
Burn Box Down cleaning again this morning


SiH4 for furnaces   Change at 100PSI  Currently @ 590 PSI

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