Diffusion morning report 11/05/02

Ted Berg tberg at snf.stanford.edu
Tue Nov 5 07:08:14 PST 2002

Good Morning All,

Pull and clean on Nitride ongoing.  Tylan 4 yellow?

Date: 11/5/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 yellow TCA Investigation
Tylan 2 Up
Tylan 3 yellow TCA Investigation
Tylan 4 yellow Uniformity issues-approximately 5%
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up TCA Investigation
Tylan 8-SiGe up  6.3/?
Tylan 9-Poly Up  26.6/30
Tylan 10-Nitride Down Pull and Clean 0/30
Tylan 11-BPSG-LTO yellow Uniformity issues 12.6/30
Tylan 12-FGA Up
Tystar Up  6.75/30???
Doped Poly Down
TEOS yellow  testing again
Tylan 16 N/A
Burn Box Up


SiH4 for furnaces   Change at 100PSI  Currently @ 580 PSI

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