Diffusion Morning report 11/06/02

[Ted Berg]

Here you go,

Nitride Questions, Tylan1 down for plumbing replacement, Burn box OK


Date: 11/6/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Down TCA Investigation-plumbing change
Tylan 2 Up
Tylan 3 yellow TCA Investigation
Tylan 4 yellow Uniformity issues-approximately 5%
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up TCA Investigation
Tylan 8-SiGe up  6.3/?
Tylan 9-Poly Up  28.4/30
Tylan 10-Nitride Down Pull and Clean-uniformity issues 0/30
Tylan 11-BPSG-LTO yellow Uniformity issues 12.8/30
Tylan 12-FGA Up
Tystar Up  6.75/30???
Doped Poly Down
TEOS yellow  testing again
Tylan 16 N/A
Burn Box Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @ 580 PSI

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