Diffusion Morning Report 11/07/02

Ted Berg tberg at snf.stanford.edu
Thu Nov 7 06:45:34 PST 2002

Here you go ,
 Tylan 1 is back together and in TCA clean, Nitride has had coat ready
for test, Poly is going down on Monday for pull and clean.

Date: 11/7/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Down TCA Investigation-plumbing change-completed, tube
changed,starting TCA clean
Tylan 2 Up
Tylan 3 yellow TCA Investigation
Tylan 4 yellow Uniformity issues-approximately 5%
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up TCA Investigation
Tylan 8-SiGe up  6.3/?
Tylan 9-Poly Up  28.4/30
Tylan 10-Nitride Down Pull and Clean again-uniformity issues 0/30
Tylan 11-BPSG-LTO yellow Uniformity issues 13.22/30
Tylan 12-FGA Up
Tystar Up  6.75/30???
Doped Poly Down
TEOS yellow  testing again
Tylan 16 N/A
Burn Box Up


SiH4 for furnaces   Change at 100PSI  Currently @ 580 PSI

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