Diffusion Morning report 11/08/02
tberg at snf.stanford.edu
Fri Nov 8 09:07:36 PST 2002
Here you go,
Several issues this morning: TCA on Tylan 7 has a small leak we are
working on it., Nitride had a problem-checked no problem found. Tylan
5,6,8 back on they were turned off last night related to leak. Still
don't know about tylan1 uniformity.
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Down TCA Investigation-plumbing-completed, tube changed,TCA
done,waiting test results
Tylan 2 Up
Tylan 3 yellow TCA Investigation
Tylan 4 yellow Uniformity issues-approximately 5%
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up TCA Investigation
Tylan 8-SiGe up 6.3/?
Tylan 9-Poly Up 28.4/30
Tylan 10-Nitride yellow power fail problem .67/30
Tylan 11-BPSG-LTO yellow Uniformity issues 13.68/30
Tylan 12-FGA Up
Tystar Up 6.75/30???
Doped Poly Down
TEOS yellow testing again
Tylan 16 N/A
Burn Box Up Cleaned this morning
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces Change at 100PSI Currently @ 580 PSI
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