Diffusion Morning Report 11/12/02

Ted Berg tberg at snf.stanford.edu
Tue Nov 12 08:04:29 PST 2002

Here you go folks,

Poly pulled and cleaned don't know if its coated or tested yet. Tylan 7
is going back together.  Burn box is very high pressure-tried a quick
clean still high-when are we going to stop this process???

Date: 11/12/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 yellow TCA Investigation
Tylan 4 yellow Uniformity issues-approximately 5%
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Down Pull and Clean-leak
Tylan 8-SiGe up  6.3/?
Tylan 9-Poly Down Pull and Clean-completed waiting for process OK 0/30
Tylan 10-Nitride Up 5.3/30
Tylan 11-BPSG-LTO yellow Uniformity issues 14.1/30
Tylan 12-FGA Up
Tystar Up  6.75/30???
Doped Poly Down
TEOS yellow  testing again
Tylan 16 N/A
Burn Box high pressure Partially Cleaned this morning


SiH4 for furnaces   Change at 100PSI  Currently @ 580 PSI

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