Diffusion Morning Report 11/13/02

Ted Berg tberg at snf.stanford.edu
Wed Nov 13 07:19:53 PST 2002


Here you go,

Poly back up after pull and clean, Tylan 7 had TCA run no problems
waiting test results, tylan 4 waiting test results, Burn box down for
clean.


Date: 11/13/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 yellow TCA Investigation
Tylan 4 yellow Uniformity issues-approximately 5%
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Down Pull and Clean completed, TCA ran OK-need test
results
Tylan 8-SiGe up  6.3/?
Tylan 9-Poly Up  .35/30
Tylan 10-Nitride Up   5.8/30
Tylan 11-BPSG-LTO yellow Uniformity issues 14.5/30
Tylan 12-FGA Up
Tystar Up  6.75/30???
Doped Poly Down
TEOS yellow  testing again
Tylan 16 N/A
Burn Box Cleaned this morning

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @ 580 PSI


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20021113/276b338f/attachment.html>


More information about the diffusion mailing list