Diffusion Morning report 11/13/02

Ted Berg tberg at snf.stanford.edu
Thu Nov 14 08:08:48 PST 2002


Here you go,

Tylan 3 in process of pull and clean.


Date: 11/14/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Down Pull and clean TCA Mod
Tylan 4 yellow Uniformity issues-approximately 5%
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up  6.4?
Tylan 9-Poly Up  .54/30
Tylan 10-Nitride Up   5.8/30
Tylan 11-BPSG-LTO yellow Uniformity issues 14.5/30
Tylan 12-FGA Up
Tystar Up  6.75/30???
Doped Poly Down
TEOS yellow  testing again
Tylan 16 N/A
Burn Box Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @ 560 PSI

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