Diffusion Morning report 11/15/02

Ted Berg tberg at snf.stanford.edu
Fri Nov 15 07:32:20 PST 2002

Here you go,
    Tylan 3 down for pull and Clean and TCA mod.  Burn box cleaned for
this  weekend.

Date: 11/15/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Down Pull and clean TCA Mod completed checking out temp now then
Tylan 4 yellow Uniformity issues-approximately 5%
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up  6.4?
Tylan 9-Poly Up  11.6/30
Tylan 10-Nitride Up   7.6/30
Tylan 11-BPSG-LTO yellow Uniformity issues 16.1/30
Tylan 12-FGA Up
Tystar Up  10.25/30???
Doped Poly Down
TEOS yellow  testing again
Tylan 16 N/A
Burn Box Up Cleaned this Morning


SiH4 for furnaces   Change at 100PSI  Currently @ 530 PSI

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