diffusion Morning Report 11/18/02

Ted Berg tberg at snf.stanford.edu
Mon Nov 18 07:06:34 PST 2002

Here you go,
    Tylan 3 ready for test, LTO broken lid replaced, Burn box checked
out even though it was -.

Date: 11/18/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Down Pull and clean TCA Mod completed ,temp cal and TCA
completed-needs test
Tylan 4 yellow Uniformity issues-approximately 5%
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up  6.5?
Tylan 9-Poly Up  16.9/30
Tylan 10-Nitride Up   8.23/30
Tylan 11-BPSG-LTO yellow Uniformity issues 16.1/30
Tylan 12-FGA Up
Tystar Up  10.25/30???
Doped Poly Down
TEOS yellow  testing again
Tylan 16 N/A
Burn Box Up Cleaned this Morning


SiH4 for furnaces   Change at 100PSI  Currently @ 515 PSI

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