Diffusion Morning Report 11/19/02

Ted Berg tberg at snf.stanford.edu
Tue Nov 19 06:47:33 PST 2002

Here you go,
    Tylan 3 back up after TCA stuff, Tylan4 damper closed test, Burn box
high and they are running it.

Date: 11/19/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up Uniformity good
Tylan 4 yellow Uniformity issues-approximately 5%
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up  6.5?
Tylan 9-Poly Up  17.9/30
Tylan 10-Nitride Up   10.21/30
Tylan 11-BPSG-LTO yellow Uniformity issues 18.8/30
Tylan 12-FGA Up
Tystar Up  10.25/30???
Doped Poly Down
TEOS yellow  testing again
Tylan 16 N/A
Burn Box HIGH Pressure


SiH4 for furnaces   Change at 100PSI  Currently @ 500 PSI

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