Diffusion Morning Report 11/22/02

[Ted Berg]

Good Morning all,

Tylan 2s TCA controller seems to be working OK, Dichlorosilane seems to
be holding after change, LTO will be going down next week for clean.


Date: 11/21/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up  6.5?
Tylan 9-Poly Up  18.3/30
Tylan 10-Nitride Up   11.9/30
Tylan 11-BPSG-LTO yellow Uniformity issues 24.2/30
Tylan 12-FGA Up
Tystar Up  13.1/30???
Doped Poly Down
TEOS yellow  testing again
Tylan 16 N/A
Burn Box Pressure OK Checking this Morning

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @490 PSI

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