Diffusion Morning Report 11/25/02
tberg at snf.stanford.edu
Mon Nov 25 08:36:49 PST 2002
Good morning folks,
Tylan BPSG had broken TC sheath that was replaced and it is back up
for hopefully one more day, Burn box was cleaned this morning,TEOS down
for boats and sled clean BPSG going down tomorrow for pull and clean.
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up 6.5?
Tylan 9-Poly Up 20.6/30
Tylan 10-Nitride Up 17.2/30
Tylan 11-BPSG-LTO Up Broken TC sheath and cantilever sheath-replaced
Tylan 12-FGA Up
Tystar Up 13.25/30???
Doped Poly Down
TEOS Down Cleaning boats and sled
Tylan 16 N/A
Burn Box Pressure OK Cleaned this morning
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces Change at 100PSI Currently @470 PSI
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