Diffusion Morning Report 11/25/02

Ted Berg tberg at snf.stanford.edu
Mon Nov 25 08:36:49 PST 2002

Good morning folks,
    Tylan BPSG had broken TC sheath that was replaced and it is back up
for hopefully one more day, Burn box was cleaned this morning,TEOS down
for boats and sled clean  BPSG going down tomorrow for pull and clean.

Date: 11/25/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe up  6.5?
Tylan 9-Poly Up  20.6/30
Tylan 10-Nitride Up   17.2/30
Tylan 11-BPSG-LTO Up Broken TC sheath and cantilever sheath-replaced
Tylan 12-FGA Up
Tystar Up  13.25/30???
Doped Poly Down
TEOS Down Cleaning boats and sled
Tylan 16 N/A
Burn Box Pressure OK Cleaned this morning


SiH4 for furnaces   Change at 100PSI  Currently @470 PSI

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