Diffusion Morning Report 11/26/02

Ted Berg tberg at snf.stanford.edu
Tue Nov 26 07:32:20 PST 2002


here you go,

BPSG down for pull and clean, SiGe cylinder change, Burn box clean.


Date: 11/26/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Down  6.75?
Tylan 9-Poly Up  20.6/30
Tylan 10-Nitride Up   18.1/30
Tylan 11-BPSG-LTO Down Pull and Clean 0/30
Tylan 12-FGA Up
Tystar Up  13.25/30???
Doped Poly Down
TEOS yellow Boats and sled cleaned
Tylan 16 N/A
Burn Box Pressure High  Cleaning this morning

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI  Currently @460 PSI

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