Diffusion Morning report 11/27/02
tberg at snf.stanford.edu
Wed Nov 27 07:12:14 PST 2002
Happy Turkey all,
Bpsg is cleaned and coated ready for test, Ge cylinder change is
completed, Ray is going through temp learning procedure for Colby and
Jim M. on TYstar.
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up Cylinder Change completed 6.75?
Tylan 9-Poly Up 23.1/30
Tylan 10-Nitride Up 18.8/30
Tylan 11-BPSG-LTO Down Pull and Clean-completed and coated 0/30
Tylan 12-FGA Up
Tystar Down Temperature check 13.25/30???
Doped Poly Down
TEOS yellow Boats and sled cleaned
Tylan 16 N/A
Burn Box Pressure OK Cleaning this morning for the weekend.
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces Change at 100PSI Currently @440 PSI
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