Diffusion Morning report 11/27/02

Ted Berg tberg at snf.stanford.edu
Wed Nov 27 07:12:14 PST 2002

Happy Turkey all,

    Bpsg is cleaned and coated ready for test, Ge cylinder change is
completed, Ray is going through temp learning procedure for Colby and
Jim M. on TYstar.

Date: 11/27/2002
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up Cylinder Change completed 6.75?
Tylan 9-Poly Up  23.1/30
Tylan 10-Nitride Up   18.8/30
Tylan 11-BPSG-LTO Down Pull and Clean-completed and coated 0/30
Tylan 12-FGA Up
Tystar Down Temperature check 13.25/30???
Doped Poly Down
TEOS yellow Boats and sled cleaned
Tylan 16 N/A
Burn Box Pressure OK Cleaning this morning for the weekend.


SiH4 for furnaces   Change at 100PSI  Currently @440 PSI

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