From seymour at snf.stanford.edu Tue Oct 1 07:18:11 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 01 Oct 2002 07:18:11 -0700 Subject: Morning report Message-ID: <3D99AEA3.85A5502@snf.stanford.edu> Date: 10/12002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Yellow TCA Investigations Tylan 2 UP Tylan 3 Yellow TCA Investigations Tylan 4 Down Waiting for results on dry ox test Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA iInvestigations Tylan 8-SiGe Up Waiting for feedback on temp. 5.2/30 Tylan 9-Poly Up 12.64/30 Tylan 10-Nitride Up 4.98/30 Tylan 11-BPSG-LTO Yellow uniformity 11.1/30 Tylan 12-FGA Up Tystar Up 24.6/30 Doped Poly Down TEOS yellow Testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for LPCVD's Change at 100 PSI Currently at 200 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Wed Oct 2 09:32:30 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Wed, 02 Oct 2002 09:32:30 -0700 Subject: Morning Report Message-ID: <3D9B1F9E.9266828@snf.stanford.edu> Date: 10/2/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Yellow TCA Investigations Tylan 2 UP Tylan 3 Yellow TCA Investigations Tylan 4 Down Waiting for results on dry ox test Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA iInvestigations Tylan 8-SiGe Up Waiting for feedback on temp. 5.2/30 Tylan 9-Poly Up 13.2/30 Tylan 10-Nitride Up 6.8/30 Tylan 11-BPSG-LTO Yellow uniformity 11.1/30 Tylan 12-FGA Up Tystar DOWN Main breaker tripped 25.4/30 Doped Poly Down TEOS DOWN Main breaker tripped Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for LPCVD's Change at 100 PSI Currently at 190 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From latta at snf.stanford.edu Wed Oct 2 10:08:41 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 02 Oct 2002 10:08:41 -0700 Subject: Morning Report References: <3D9B1F9E.9266828@snf.stanford.edu> Message-ID: <3D9B2819.CF7F8C24@snf.stanford.edu> Hi guys, I just wanted to pick a couple of nits with the daily report; Tylan2 is down from last night as of this writing. Tylan4 has had the dry and wet ox tests and is waiting for gas flow investigations. Thanks, Nancy Ray Seymour wrote: > > & > nbsp; > ; > ; > Date: 10/2/2002 > Tube Name/Number Status Comments THICKNESS-Change at > Tylan 1 Yellow TCA Investigations > Tylan 2 UP > Tylan 3 Yellow TCA Investigations > Tylan 4 Down Waiting for results on dry ox test > Tylan 5-BBr3 Up > Tylan 6-POCl3 Up > Tylan 7-Dirty Ox Up TCA iInvestigations > Tylan 8-SiGe Up Waiting for feedback on temp. 5.2/30 > Tylan 9-Poly > Up 13.2/30 > Tylan 10-Nitride > Up 6.8/30 > Tylan 11-BPSG-LTO Yellow uniformity 11.1/30 > Tylan 12-FGA Up > Tystar DOWN Main breaker tripped 25.4/30 > Doped Poly Down > TEOS DOWN Main breaker tripped > Tylan 16 N/A > Burn Box Up > > GAAS 22 UP > GAAS 23 UP > SiH4 for LPCVD's Change at 100 PSI Currently at 190 PSI > > -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu From seymour at snf.stanford.edu Wed Oct 2 10:29:44 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Wed, 02 Oct 2002 10:29:44 -0700 Subject: updated morning report Message-ID: <3D9B2D08.AAC31264@snf.stanford.edu> Date: 10/2/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Yellow TCA Investigations Tylan 2 DOWN H2/O2 flow problem during NEWTCA Tylan 3 Yellow TCA Investigations Tylan 4 Down Waiting for gas flow investigations Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA iInvestigations Tylan 8-SiGe Up Waiting for feedback on temp. 5.2/30 Tylan 9-Poly Up 13.2/30 Tylan 10-Nitride Up 6.8/30 Tylan 11-BPSG-LTO Yellow uniformity 11.1/30 Tylan 12-FGA Up Tystar DOWN Main breaker tripped 25.4/30 Doped Poly Down TEOS DOWN Main breaker tripped Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for LPCVD's Change at 100 PSI Currently at 190 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Thu Oct 3 07:35:36 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 03 Oct 2002 07:35:36 -0700 Subject: Morning Report Message-ID: <3D9C55B8.771F2B51@snf.stanford.edu> Date: 10/3/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Yellow TCA Investigations Tylan 2 DOWN H2/O2 flow problem during NEWTCA Tylan 3 Yellow TCA Investigations Tylan 4 Down Waiting for gas flow investigations Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigations Tylan 8-SiGe Up Waiting for feedback on temp. 5.2/30 Tylan 9-Poly Up 14.2/30 Tylan 10-Nitride Up 6.8/30 Tylan 11-BPSG-LTO Yellow uniformity 11.7/30 Tylan 12-FGA Up Tystar DOWN Main breaker tripped 25.4/30 Doped Poly Down TEOS DOWN Main breaker tripped Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for LPCVD's Change at 100 PSI Currently at 180 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri Oct 4 07:14:09 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 04 Oct 2002 07:14:09 -0700 Subject: Morning report Message-ID: <3D9DA231.7AB1BD90@snf.stanford.edu> Date: 10/4/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Yellow TCA Investigations Tylan 2 UP Tylan 3 Yellow TCA Investigations Tylan 4 Down Waiting for gas flow investigations Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigations Tylan 8-SiGe Up Waiting for feedback on temp. 5.2/30 Tylan 9-Poly Up 16.1/30 Tylan 10-Nitride Up 6.9/30 Tylan 11-BPSG-LTO Yellow uniformity 11.7/30 Tylan 12-FGA Up Tystar DOWN Not pumping down 25.4/30 Doped Poly Down TEOS Yellow Testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for LPCVD's Change at 100 PSI Currently at 180 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From Dwent1 at direcway.com Fri Oct 4 13:51:56 2002 From: Dwent1 at direcway.com (Doug Wentz) Date: Fri, 4 Oct 2002 13:51:56 Subject: Free Oracle DBA Training for individuals - Message-ID: We offer Free Oracle DBA Training for individuals and on site 1 Week classes for under $4000.00 including expenses. We are pleased to ofer free Oracle DBA training for individuals. Additionally, we provide courseware and on site training at very competitive prices. Please go to www.DougWentz.com for details. Thanks Doug Wentz -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Mon Oct 7 08:36:47 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Mon, 07 Oct 2002 08:36:47 -0700 Subject: Morning Report Message-ID: <3DA1AA0E.AB394D0C@snf.stanford.edu> Date: 10/7/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Yellow TCA Investigations Tylan 2 UP Tylan 3 Yellow TCA Investigations Tylan 4 Down Waiting for gas flow investigations Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigations Tylan 8-SiGe Yellow Waiting for feedback on temp. Silane cylinder change 5.2/30 Tylan 9-Poly Down Silane cylinder change 17/30 Tylan 10-Nitride Up 7.32/30 Tylan 11-BPSG-LTO Down uniformity and Silane cylinder change 14.9/30 Tylan 12-FGA Up Tystar Down Pull and clean. And silane cylinder change 25.4/30 Doped Poly Down TEOS Yellow Testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for LPCVD's Change at 100 PSI Currently on leak check after cylinder change -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Tue Oct 8 07:39:58 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 08 Oct 2002 07:39:58 -0700 Subject: Morning report Message-ID: <3DA2EE3D.961F8E07@snf.stanford.edu> Date: 10/8/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Yellow TCA Investigations Tylan 2 UP Tylan 3 Yellow TCA Investigations Tylan 4 Down Waiting for gas flow investigations Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigations Tylan 8-SiGe Yellow Waiting for feedback on temp. 5.2/30 Tylan 9-Poly Up 17/30 Tylan 10-Nitride Up 7.32/30 Tylan 11-BPSG-LTO Yellow Uniformity 14.9/30 Tylan 12-FGA Up Tystar Down Pull and clean. 0/30 Doped Poly Down TEOS Yellow Testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for LPCVD's Change at 100 PSI Currently at 740 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Wed Oct 9 08:18:20 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Wed, 09 Oct 2002 08:18:20 -0700 Subject: Morning Report Message-ID: <3DA448BC.5C3F0E1C@snf.stanford.edu> Date: 10/9/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Yellow TCA Investigations Tylan 2 UP Tylan 3 Yellow TCA Investigations Tylan 4 Down Waiting for gas flow investigations Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigations Tylan 8-SiGe Yellow Waiting for feedback on temp. 5.43/30 Tylan 9-Poly Up 17.2/30 Tylan 10-Nitride Up 8.05/30 Tylan 11-BPSG-LTO Yellow Uniformity 15.83/30 Tylan 12-FGA Up Tystar Down Temp calibration. 0/30 Doped Poly Down TEOS Yellow Testing again Tylan 16 N/A Burn Box Up Cleaned this morning GAAS 22 UP GAAS 23 UP SiH4 for LPCVD's Change at 100 PSI Currently at 720 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Thu Oct 10 07:43:43 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 10 Oct 2002 07:43:43 -0700 Subject: Morning Report Message-ID: <3DA5921F.5F88F00B@snf.stanford.edu> Date: 10/10/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Yellow TCA Investigations Tylan 2 UP Tylan 3 Yellow TCA Investigations Tylan 4 Down Waiting for gas flow investigations Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigations Tylan 8-SiGe Yellow Waiting for feedback on temp. 5.43/30 Tylan 9-Poly Up 17.8/30 Tylan 10-Nitride Up 8.35/30 Tylan 11-BPSG-LTO Down broken quartz loader sheath 15.83/30 Tylan 12-FGA Up Tystar Up .65/30 Doped Poly Down TEOS Yellow TEOS low levelalarm Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for LPCVD's Change at 100 PSI Currently at 130 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri Oct 11 06:58:13 2002 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 11 Oct 2002 06:58:13 -0700 Subject: Morning Report Message-ID: <3DA6D8F5.D347437D@snf.stanford.edu> Date: 10/11/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Yellow TCA Investigations Tylan 2 UP Tylan 3 Yellow TCA Investigations Tylan 4 Down Waiting for gas flow investigations Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigations Tylan 8-SiGe Yellow Waiting for feedback on temp. 5.43/30 Tylan 9-Poly Up 19.8/30 Tylan 10-Nitride Up 11.06/30 Tylan 11-BPSG-LTO Yellow Uniformity 16.93/30 Tylan 12-FGA Up Tystar Up .65/30 Doped Poly Down TEOS Yellow Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for LPCVD's Change at 100 PSI Currently at 700 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Oct 14 07:56:46 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 14 Oct 2002 07:56:46 -0700 Subject: Daily Update 10/14/02 Message-ID: <3DAADB2E.5ADE85FA@snf.stanford.edu> good morning all, LTO screen replaced and back up, Jim still working on Tylans, No problem found on SiGe back up. Date: 10/14/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Down TCA Investigation-gas flows Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up Waiting for feedback on Temp-SiH4 alarm cleared 5.2/??? Tylan 9-Poly Up 20.8/30 Tylan 10-Nitride Up 12.1/30 Tylan 11-BPSG-LTO yellow uniformity-screen cleaned 20.5/30 Tylan 12-FGA Up Tystar Up .5/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 700 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Oct 15 07:22:55 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 15 Oct 2002 07:22:55 -0700 Subject: Daily Update 10/15/02 Message-ID: <3DAC24BF.AC142804@snf.stanford.edu> Here you go, Tylan 4 continues, BPSG checked out base and leak rate good-see e-mail Date: 10/15/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Down TCA Investigation-gas flows Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up Waiting for feedback on Temp- 5.2/??? Tylan 9-Poly Up 21.1/30 Tylan 10-Nitride Up 12.1/30 Tylan 11-BPSG-LTO yellow low dep rate, high pressure-Checked base pressure and leak rate both are fine 24.8/30 Tylan 12-FGA Up Tystar Up .5/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 700 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Oct 16 06:50:44 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 16 Oct 2002 06:50:44 -0700 Subject: Daily Update 10/16/02 Message-ID: <3DAD6EB4.CC26B054@snf.stanford.edu> here you go, Date: 10/16/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Down TCA Investigation-gas flows Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 5.4/??? Tylan 9-Poly Up 21.1/30 Tylan 10-Nitride Up 12.3/30 Tylan 11-BPSG-LTO yellow low dep rate, high pressure-Checked base pressure and leak rate both are fine 25.0/30 Tylan 12-FGA Up Tystar Up .5/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 670 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Oct 17 06:40:04 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 17 Oct 2002 06:40:04 -0700 Subject: daily update 10/17/02 Message-ID: <3DAEBDB4.51F5C6A9@snf.stanford.edu> here you go, Note: LTO is getting close to clean thickness it goes down at 30 microns, currently at 25 microns Date: 10/17/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Down TCA Investigation-gas flows Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 5.4/??? Tylan 9-Poly Up 21.1/30 Tylan 10-Nitride Up 12.6/30 Tylan 11-BPSG-LTO yellow low dep rate, high pressure 25.0/30 Tylan 12-FGA Up Tystar Up 4.5/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 670 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Oct 18 07:14:58 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 18 Oct 2002 07:14:58 -0700 Subject: daily update 10/18/02 Message-ID: <3DB01762.1E5BEE48@snf.stanford.edu> here you go, We are checking LTO out to see why pressure is going high. Date: 10/18/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Down TCA Investigation-gas flows Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 5.4/??? Tylan 9-Poly Up 21.1/30 Tylan 10-Nitride Up 12.6/30 Tylan 11-BPSG-LTO Down low dep rate, high pressure 25.0/30 Tylan 12-FGA Up Tystar Up 4.5/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 670 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Oct 21 06:48:18 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 21 Oct 2002 06:48:18 -0700 Subject: Daily Update 10/20/02 Message-ID: <3DB405A2.45AAF63C@snf.stanford.edu> Good morning all, Note: LTO was at 32 microns -it is down for Pull and Clean, Date: 10/20/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Down TCA Investigation-gas flows Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 5.4/??? Tylan 9-Poly Up 22.2/30 Tylan 10-Nitride Up 13.8/30 Tylan 11-BPSG-LTO Down low dep rate, high pressure-pull and clean 0/30 Tylan 12-FGA Up Tystar Up 4.5/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 670 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Oct 22 06:48:56 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 22 Oct 2002 06:48:56 -0700 Subject: daily report 10/21/02 Message-ID: <3DB55748.85FF38FA@snf.stanford.edu> here you go, LTO is almost back together and will need a test. Date: 10/21/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Down TCA Investigation-gas flows Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 5.7/??? Tylan 9-Poly Up 22.2/30 Tylan 10-Nitride Up 14.8/30 Tylan 11-BPSG-LTO Down low dep rate, high pressure-pull and clean 0/30 Tylan 12-FGA Up Tystar Up 4.5/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 665 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Oct 23 07:00:04 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 23 Oct 2002 07:00:04 -0700 Subject: daily Update 10/23/02 Message-ID: <3DB6AB64.BA89BB03@snf.stanford.edu> Here you go, Note: LTO/BPSG is back up after tube clean. Tylan 4 is testing after cals and TCA stuff. Date: 10/23/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Down TCA Investigation-testing Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 5.7/??? Tylan 9-Poly Up 22.2/30 Tylan 10-Nitride Up 14.8/30 Tylan 11-BPSG-LTO Up Pull and clean completed 1.48/30 Tylan 12-FGA Up Tystar Up 4.5/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Oct 24 06:33:03 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 24 Oct 2002 06:33:03 -0700 Subject: diffusion Morning report 10/24/02 Message-ID: <3DB7F68F.4613C1C3@snf.stanford.edu> here you go, Tylan 4 is finally back up. Thanks, Nancy, Jim and Ray. Date: 10/23/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Up tested ok Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 5.7/??? Tylan 9-Poly Up 22.3/30 Tylan 10-Nitride Up 14.8/30 Tylan 11-BPSG-LTO Up 1.77/30 Tylan 12-FGA Up Tystar Up 4.5/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Down cleaning this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Oct 25 07:49:47 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 25 Oct 2002 07:49:47 -0700 Subject: Diffusion Morning Report 10/25/02 Message-ID: <3DB95A0B.3458F752@snf.stanford.edu> here you go, Tylan 4 pulled for clean after line work. Burn box has high pressure after only one day. Too much Nitride. Date: 10/25/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Down pull and clean Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 5.7/??? Tylan 9-Poly Up 22.3/30 Tylan 10-Nitride Up 17.1/30 Tylan 11-BPSG-LTO Up 2.67/30 Tylan 12-FGA Up Tystar Up 4.5/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Down Again cleaning this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 655 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Oct 28 06:48:23 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 28 Oct 2002 06:48:23 -0800 Subject: Diffusion Morning report 10/28/02 Message-ID: <3DBD4E37.7796E966@snf.stanford.edu> Morning all, TYlan 4 is pulled and replaced, has had TCA clean needs test. Burn box was high again lots of dep over the weekend. Date: 10/28/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Down pull and clean completed-TCA Clean and Test Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 6.1/? Tylan 9-Poly Up 23.1/30 Tylan 10-Nitride Up 21.1/30 Tylan 11-BPSG-LTO Up 5.9/30 Tylan 12-FGA Up Tystar Up 4.5/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Down Again cleaning this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 640 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Oct 29 07:08:12 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 29 Oct 2002 07:08:12 -0800 Subject: Diffusion morning report 10/29/02 Message-ID: <3DBEA45C.80275DA0@snf.stanford.edu> here you go, Tylan 4 testing Date: 10/29/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Down pull and clean completed-TCA Clean completed needs Test Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 6.1/? Tylan 9-Poly Up 23.1/30 Tylan 10-Nitride Up 21.1/30 Tylan 11-BPSG-LTO Up 6.3/30 Tylan 12-FGA Up Tystar Up 4.8/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 630 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Oct 30 08:58:53 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 30 Oct 2002 08:58:53 -0800 Subject: diffusion morning report 10/30/02 Message-ID: <3DC00FCD.B666E06F@snf.stanford.edu> Here you go folks, Date: 10/30/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Down pull and clean completed-TCA Clean completed- Testing Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 6.3/? Tylan 9-Poly Up 23.1/30 Tylan 10-Nitride Up 21.3/30 Tylan 11-BPSG-LTO Up Ran Uniformity test yesterday 6.3/30 Tylan 12-FGA Up Tystar Up 4.8/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 630 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Oct 31 07:11:02 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 31 Oct 2002 07:11:02 -0800 Subject: Diffusion morning report 10/31/02 Message-ID: <3DC14806.9F8BF410@snf.stanford.edu> Happy Halloween all, Tylan 4 investigation continues. Lto uniformity issues. Burn box plugged again-maybe because of the 5 microns of nitride. Date: 10/31/2002 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow TCA Investigation Tylan 2 Up Tylan 3 yellow TCA Investigation Tylan 4 Down pull and clean completed-TCA Clean completed- Testing Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up TCA Investigation Tylan 8-SiGe up 6.3/? Tylan 9-Poly Up 24.1/30 Tylan 10-Nitride Up 26.1/30 Tylan 11-BPSG-LTO yellow Ran Uniformity test yesterday-it was worse 7.48/30 Tylan 12-FGA Up Tystar Up 5.25/30??? Doped Poly Down TEOS yellow testing again Tylan 16 N/A Burn Box Down cleaning again this morning GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently @ 615 PSI- its cold this morning -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Oct 31 07:15:46 2002 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 31 Oct 2002 07:15:46 -0800 Subject: Diffusion morning report 10/31/02 References: <3DC14806.9F8BF410@snf.stanford.edu> Message-ID: <3DC14922.8079605B@snf.stanford.edu> Sorry comment should read 1.5microns of Nitride not 5 microns! Ted Berg wrote: > Happy Halloween all, > Tylan 4 investigation continues. Lto uniformity issues. Burn box > plugged again-maybe because of the 5 microns of nitride. > > > > &n > bsp; > Date: 10/31/2002 > Tube Name/Number Status Comments THICKNESS-Change at > Tylan 1 yellow TCA Investigation > Tylan 2 Up > Tylan 3 yellow TCA Investigation > Tylan 4 Down pull and clean completed-TCA Clean completed- Testing > Tylan 5-BBr3 Up > Tylan 6-POCl3 Up > Tylan 7-Dirty Ox Up TCA Investigation > Tylan 8-SiGe up 6.3/? > Tylan 9-Poly Up 24.1/30 > Tylan 10-Nitride Up 26.1/30 > Tylan 11-BPSG-LTO yellow Ran Uniformity test yesterday-it was worse > 7.48/30 > Tylan 12-FGA Up > Tystar Up 5.25/30??? > Doped Poly Down > TEOS yellow testing again > Tylan 16 N/A > Burn Box Down cleaning again this morning > > GAAS 22 UP > GAAS 23 UP > > SiH4 for furnaces Change at 100PSI Currently @ 615 PSI- its cold > this morning > -------------- next part -------------- An HTML attachment was scrubbed... URL: