From tberg at snf.stanford.edu Fri Aug 1 06:29:50 2003 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 01 Aug 2003 06:29:50 -0700 Subject: Diffusion Morning Report 08/01/03 Message-ID: <3F2A6B4E.4050609@snf.stanford.edu> Good Morning all, Happy August. Everything looking good this morning. Burn box clean this morning. Nitride going down on Tues. for pull and clean Diffusion Date: 8/1/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up .87/30 Tylan 10-Nitride yellow bubble problem-possible NH3 panel change 24.3/30 Tylan 11-BPSG-LTO Up 10.5/30 Tylan 12-FGA Up Tystar Up 9.0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up Cleaning this Morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A side cylinder Changed yesterday and leak tested Currently 720- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Aug 4 06:41:20 2003 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 04 Aug 2003 06:41:20 -0700 Subject: Diffusion Morning Report 08/04/03 Message-ID: <3F2E6280.1000103@snf.stanford.edu> Good Morning all, Things are looking good this morning. Nitride going down tomorrow for pull and clean and tomorrow morning we will be looking at the NH3 panel. Everything else looks OK. Diffusion Date: 8/4/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 2.97/30 Tylan 10-Nitride yellow bubble problem-possible NH3 panel change 26.1/30 Tylan 11-BPSG-LTO Up 11.7./30 Tylan 12-FGA Up Tystar Up 9.0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 700- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Aug 5 06:30:23 2003 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 05 Aug 2003 06:30:23 -0700 Subject: Diffusion Morning Report 08/05/03 Message-ID: <3F2FB16F.6000501@snf.stanford.edu> Good Morning All, Things are looking good this morning. Nitride is down for pull and clean and check out of NH3 panel. We arecleaning the burn box this morning. Everything else looks fine. Diffusion Date: 8/5/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 3.07/30 Tylan 10-Nitride Down pull and clean, NH3 panel Check out 0/30 Tylan 11-BPSG-LTO Up 11.7./30 Tylan 12-FGA Up Tystar Up 9.0/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up Cleaning this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 700- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Aug 6 07:13:49 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 06 Aug 2003 07:13:49 -0700 Subject: Diffusion Morning Report 08/06/03 Message-ID: <3F310D1D.8090306@snf.stanford.edu> Good Morning all, Things are looking good this morning the Nitride tube is back together and leak tight heating back up. the ammonia has a bit to go on the leak check. Everything else looking good. Diffusion Date: 8/6/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 4.3/30 Tylan 10-Nitride Down pull and clean, NH3 panel Check out 0/30 Tylan 11-BPSG-LTO Up 14.5./30 Tylan 12-FGA Up Tystar Up 9.0/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 700- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Aug 7 06:29:16 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 07 Aug 2003 06:29:16 -0700 Subject: Diffusion Morning Report 08/07/03 Message-ID: <3F32542C.9020208@snf.stanford.edu> Good Morning all, Everything looking good. Nitride Pull and clean completed, looks like bubbles still around. NH3 panel corrected. everything else looking good. Diffusion Date: 8/7/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 4.4/30 Tylan 10-Nitride yellow p & C completed, NH3 panel repaired-bubbles .2/30 Tylan 11-BPSG-LTO Up 14.7./30 Tylan 12-FGA Up Tystar Up 9.0/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 690- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Aug 8 08:02:23 2003 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 08 Aug 2003 08:02:23 -0700 Subject: Diffusion Morning Report 08/08/03 Message-ID: <3F33BB7F.9060809@snf.stanford.edu> Good Morning All, Everything looking good this morning . Burn box checked out fine, Checked Gas flows in Nitride. Apparently still bubbles in nitride. Diffusion Date: 8/8/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 4.4/30 Tylan 10-Nitride yellow bubbles .5/30 Tylan 11-BPSG-LTO Up 16.1./30 Tylan 12-FGA Up Tystar Up 9.0/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up Checked this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 680- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Aug 11 06:56:15 2003 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 11 Aug 2003 06:56:15 -0700 Subject: Diffusion Morning report 08/11/03 Message-ID: <3F37A07F.7030505@snf.stanford.edu> Good Morning all, Things are looking good this morning. Nitride things still exist. Everything else looking good. Diffusion Date: 8/11/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 6.1/30 Tylan 10-Nitride yellow stars 2.8/30 Tylan 11-BPSG-LTO Up 17.5./30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 680- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Aug 12 06:38:15 2003 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 12 Aug 2003 06:38:15 -0700 Subject: Diffusion Morning Report 8/11/03 Message-ID: <3F38EDC7.5000603@snf.stanford.edu> Good morning all, Looking pretty good. Nitride still has things, LTO had a high leak rate but this morning it looked fine. Rohits pointed out an error in the recipe regarding pressure. Everything else looking good. Diffusion Date: 8/12/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 6.1/30 Tylan 10-Nitride yellow things in film 2.9/30 Tylan 11-BPSG-LTO yellow Leak rate checked good-recipe issues 18.7/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 680- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Aug 13 06:59:41 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 13 Aug 2003 06:59:41 -0700 Subject: Diffusion Morning report 8/13/03 Message-ID: <3F3A444D.2020800@snf.stanford.edu> Good Morning all, Everything looking good this morning. Good progress on Nitride dilemma more tests to come. Not sure about recipe issue with LTO? DCS change for Epi tomorrow morning. Diffusion Date: 8/13/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 6.1/30 Tylan 10-Nitride yellow things 3.1/30 Tylan 11-BPSG-LTO yellow Leak rate checked good-recipe issues 20.88/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 680- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Aug 14 08:00:34 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 14 Aug 2003 08:00:34 -0700 Subject: Diffusion Morning report 8/14/03 Message-ID: <3F3BA412.5050103@snf.stanford.edu> Good Morning all, We were off to a less than perfect start. The burn box was very high, we cleaned it and changed the soft pump valve on Nitride. We are changing the DCS for Epi this morning. Nitrogen test looked good as far as O2 and moisture in the N2. Everything else looks ok. Diffusion Date: 8/14/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 7.0/30 Tylan 10-Nitride yellow things-Soft pump valve replaced 4.6/30 Tylan 11-BPSG-LTO yellow recipe issues 20.88/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 680- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Aug 15 06:58:57 2003 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 15 Aug 2003 06:58:57 -0700 Subject: Diffusion Morning Report 8/15/03 Message-ID: <3F3CE721.7070104@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Cleaning the burn box manifold this morning. Process testing of the Nitride. Everything else looks good. Diffusion Date: 8/15/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 7.0/30 Tylan 10-Nitride yellow Process testing 6.3/30 Tylan 11-BPSG-LTO yellow recipe issues 24.1/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 680- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Aug 18 06:31:23 2003 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 18 Aug 2003 06:31:23 -0700 Subject: Diffusion Morning Report 8/18/03 Message-ID: <3F40D52B.4040701@snf.stanford.edu> Good Morning all, Things are looking good this morning. Still not sure why LTO is yellow-recipe issue? Nitride investigation ongoing. Everything else looking good. Diffusion Date: 8/18/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 15.5/30 Tylan 10-Nitride yellow Process testing 6.9/30 Tylan 11-BPSG-LTO yellow recipe issues 24.9/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 660- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From help at rescuecharles.org Mon Aug 18 16:54:45 2003 From: help at rescuecharles.org (help at rescuecharles.org) Date: Mon, 18 Aug 2003 19:54:45 -0400 Subject: Rescue Charles Lee Message-ID: <200308182354.h7INsjP11313@ensim.rackshack.net> -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Aug 19 06:53:42 2003 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 19 Aug 2003 06:53:42 -0700 Subject: Diffusion Morning Report 8/20/03 Message-ID: <3F422BE6.9000204@snf.stanford.edu> Good Morning all, Everything looking good this morning. Nitride investigation ongoing. Eleven hour run in progress. What is going on with LTO it is still Yellow? Diffusion Date: 8/19/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 17.6/30 Tylan 10-Nitride yellow Process testing 9.9/30 Tylan 11-BPSG-LTO yellow recipe issues 26.1/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 660- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Aug 20 06:41:37 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 20 Aug 2003 06:41:37 -0700 Subject: Diffusion Morning report 08/20/03 Message-ID: <3F437A91.2000209@snf.stanford.edu> Good Morning all, Everything looking good this morning. LTO going down tomorrow morning for pull and clean. Mike D. stocked photo chemicals this morning in prep for tank removal in solvent room. Diffusion Date: 8/20/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 19.22/30 Tylan 10-Nitride yellow Process testing 10.4/30 Tylan 11-BPSG-LTO yellow Maurice to change to green??? 26.9/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 660- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Aug 21 07:47:34 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 21 Aug 2003 07:47:34 -0700 Subject: Diffusion Morning Report 8/21/03 Message-ID: <3F44DB86.2010008@snf.stanford.edu> Good Morning All, Everything is looking pretty good this morning. LTO is being pulled and cleaned as of now. Nitride is running and testing. TEOS had Temp issues yesterday, we could find no smoking gun. Diffusion Date: 8/20/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 19.22/30 Tylan 10-Nitride yellow Process testing 11./30 Tylan 11-BPSG-LTO Down Pull and clean 0/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Temperature issues Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 660- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Aug 22 08:23:12 2003 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 22 Aug 2003 08:23:12 -0700 Subject: Diffusion Morning Report 8/22/03 Message-ID: <3F463560.20403@snf.stanford.edu> Good Morning All, Everything is looking good this morning. Everything came together nicely yesterday on the LTO P and C it was back up in less than 12 hours, good job all! He leak checked nitride this morning, found one very tiny leak at a swagelock fitting and tightened it. All gas lines, pump lines and tube connections looked fine. Everything else looking fine. Diffusion Date: 8/22/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 19.22/30 Tylan 10-Nitride yellow Process testing 12.3/30 Tylan 11-BPSG-LTO Up Pull and clean completed .4/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Possible Temperature issues Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 660- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Aug 25 06:33:12 2003 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 25 Aug 2003 06:33:12 -0700 Subject: Diffusion Morning Report 08/25/03 Message-ID: <3F4A1018.2000201@snf.stanford.edu> Good Morning all, Things are looking good this morning. Burn box is being cleaned again, pressure is high. Everything else looks pretty good. Diffusion Date: 8/25/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 21.45/30 Tylan 10-Nitride yellow Process testing 16.4/30 Tylan 11-BPSG-LTO Up 3.2/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Temperature issues Tylan 16 N/A Burn Box Up Had high pressure this am-cleaned ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 660- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Aug 25 06:36:45 2003 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 25 Aug 2003 06:36:45 -0700 Subject: Diffusion Morning Report 08/25/03 Message-ID: <3F4A10ED.6080101@snf.stanford.edu> Good Morning all, Things are looking good this morning. Burn box is being cleaned again, pressure is high. Everything else looks pretty good. Diffusion Date: 8/25/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 21.45/30 Tylan 10-Nitride yellow Process testing 16.4/30 Tylan 11-BPSG-LTO Up 3.2/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Temperature issues Tylan 16 N/A Burn Box Up Had high pressure this am-cleaned ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 660- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Aug 26 06:27:45 2003 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 26 Aug 2003 06:27:45 -0700 Subject: Diffusion Morning Report 08/26/03 Message-ID: <3F4B6051.4020303@snf.stanford.edu> Good Morning All, Everything looking good . Interesting results on Nitride. We have ordered a signal conditioner so we can log Temp data on furnaces especially TEOS. Diffusion Date: 8/26/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 21.7/30 Tylan 10-Nitride yellow Process testing 16.9/30 Tylan 11-BPSG-LTO Up 3.2/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Temperature issues Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 660- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Aug 27 06:24:38 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 27 Aug 2003 06:24:38 -0700 Subject: Diffusion Morning Report 08/27/03 Message-ID: <3F4CB116.4060709@snf.stanford.edu> Good Morning all, Everything looking good this morning. Diffusion Date: 8/27/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly Up 21.8/30 Tylan 10-Nitride yellow Process testing 17.8/30 Tylan 11-BPSG-LTO Up 3.2/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Temperature issues Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 645- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Aug 28 06:34:52 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 28 Aug 2003 06:34:52 -0700 Subject: Diffusion Morning Report 08/28/03 Message-ID: <3F4E04FC.3060107@snf.stanford.edu> Good Morning all, Poly has a problem with the N2 Backfill flow, we are checking it out this morning. Everything else looking good. Diffusion Date: 8/28/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 9.9/30 Tylan 9-Poly down Backfill flow Bad, Checking it out. 21.8/30 Tylan 10-Nitride yellow Process testing 19.5/30 Tylan 11-BPSG-LTO Up 3.2/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly GONE TEOS yellow Temperature issues Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 640- B(c7) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri Aug 29 08:51:28 2003 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 29 Aug 2003 08:51:28 -0700 Subject: Diffusion morning report 8/28/03 Message-ID: <3F4F7680.9CFA0C65@snf.stanford.edu> Date: 8/28/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 UP Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe UP 9.9/30 Tylan 9-Poly Up 21.98/30 Tylan 10-Nitride yellow Process testing 20.09/30 Tylan 11-BPSG-LTO Up 3.16/30 Tylan 12-FGA Up Tystar Up 9.3/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 625- B(c7) on line