Diffusion Morning Report 08/01/03

ted berg tberg at snf.stanford.edu
Fri Aug 1 06:29:50 PDT 2003


Good Morning all,  
    Happy August.  Everything looking good this morning. Burn box clean 
this morning.  Nitride going down on Tues. for pull and clean

Diffusion 	Date: 	8/1/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	Up 	  	 
Tylan 8-SiGe 	Up 	  	9.9/30
Tylan 9-Poly 	Up 	  	.87/30
Tylan 10-Nitride 	yellow 	bubble problem-possible NH3 panel change 	24.3/30
Tylan 11-BPSG-LTO 	Up 	  	10.5/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	9.0/30
Doped Poly 	Down 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	Cleaning this Morning 	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	A side cylinder Changed yesterday and leak 
tested 	Currently 720- B(c7) on line


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