Diffusion Morning Report 08/04/03

ted berg tberg at snf.stanford.edu
Mon Aug 4 06:41:20 PDT 2003


Good Morning all,
    Things are looking good this morning. Nitride going down tomorrow 
for pull and clean and tomorrow morning we will be looking at the NH3 panel.
Everything else looks OK.

Diffusion 	Date: 	8/4/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	Up 	  	 
Tylan 8-SiGe 	Up 	  	9.9/30
Tylan 9-Poly 	Up 	  	2.97/30
Tylan 10-Nitride 	yellow 	bubble problem-possible NH3 panel change 	26.1/30
Tylan 11-BPSG-LTO 	Up 	  	11.7./30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	9.0/30
Doped Poly 	Down 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 700- B(c7) 
on line


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