Diffusion Morning Report 08/05/03

ted berg tberg at snf.stanford.edu
Tue Aug 5 06:30:23 PDT 2003

Good Morning All,
    Things are looking good this morning. Nitride is down for pull and 
clean and check out of NH3 panel.  We arecleaning the burn box this morning.
Everything else looks fine.

Diffusion 	Date: 	8/5/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	Up 	  	 
Tylan 8-SiGe 	Up 	  	9.9/30
Tylan 9-Poly 	Up 	  	3.07/30
Tylan 10-Nitride 	Down 	pull and clean, NH3 panel Check out 	0/30
Tylan 11-BPSG-LTO 	Up 	  	11.7./30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	9.0/30
Doped Poly 	Down 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	Cleaning this morning 	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 700- B(c7) 
on line

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