Diffusion Morning Report 08/06/03

ted berg tberg at snf.stanford.edu
Wed Aug 6 07:13:49 PDT 2003


Good Morning all,
    Things are looking good this morning the Nitride tube is back 
together and leak tight heating back up. the ammonia has a bit to go on 
the leak check.
Everything else looking good.

Diffusion 	Date: 	8/6/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	Up 	  	 
Tylan 8-SiGe 	Up 	  	9.9/30
Tylan 9-Poly 	Up 	  	4.3/30
Tylan 10-Nitride 	Down 	pull and clean, NH3 panel Check out 	0/30
Tylan 11-BPSG-LTO 	Up 	  	14.5./30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	9.0/30
Doped Poly 	GONE
	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 700- B(c7) 
on line


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