Diffusion Morning Report 8/11/03

ted berg tberg at snf.stanford.edu
Tue Aug 12 06:38:15 PDT 2003

Good morning all,
    Looking pretty good. Nitride still has things, LTO had a high leak 
rate but this morning it looked fine.  Rohits pointed out an error  in 
the recipe regarding pressure.  Everything else looking good.

Diffusion 	Date: 	8/12/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	Up 	  	 
Tylan 8-SiGe 	Up 	  	9.9/30
Tylan 9-Poly 	Up 	  	6.1/30
Tylan 10-Nitride 	yellow 	things in film
Tylan 11-BPSG-LTO 	yellow 	Leak rate checked good-recipe issues 	18.7/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	9.3/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 680- B(c7) 
on line

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