Diffusion Morning report 8/13/03

ted berg tberg at snf.stanford.edu
Wed Aug 13 06:59:41 PDT 2003

Good Morning all,
    Everything looking good this morning. Good progress on Nitride 
dilemma more tests to come.  Not sure about recipe issue with LTO?
DCS change for Epi tomorrow morning. 

Diffusion 	Date: 	8/13/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	Up 	  	 
Tylan 8-SiGe 	Up 	  	9.9/30
Tylan 9-Poly 	Up 	  	6.1/30
Tylan 10-Nitride 	yellow 	things 	3.1/30
Tylan 11-BPSG-LTO 	yellow 	Leak rate checked good-recipe issues 	20.88/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	9.3/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 680- B(c7) 
on line

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