Diffusion Morning Report 8/22/03

ted berg tberg at snf.stanford.edu
Fri Aug 22 08:23:12 PDT 2003

Good Morning All,
    Everything is looking good this morning. Everything came together 
nicely yesterday on the LTO P and C it was back up in less than 12 
hours, good job all!
He leak  checked nitride this morning, found one very tiny leak at a 
swagelock fitting and tightened it.  All gas lines, pump lines and tube 
connections looked fine.
Everything else looking fine.

Diffusion 	Date: 	8/22/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	Up 	  	 
Tylan 8-SiGe 	Up 	  	9.9/30
Tylan 9-Poly 	Up 	  	19.22/30
Tylan 10-Nitride 	yellow 	Process testing 	12.3/30
Tylan 11-BPSG-LTO 	Up 	Pull and clean completed 	.4/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	9.3/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	Possible Temperature issues 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	Cleaned this morning 	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 660- B(c7) 
on line

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