Diffusion morning report 8/28/03

Ray Seymour seymour at snf.stanford.edu
Fri Aug 29 08:51:28 PDT 2003


Date: 8/28/2003
Tube Name/Number Status
Comments                                 THICKNESS-Change at
Tylan 1 Up
Tylan 2 UP
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe
UP
9.9/30
Tylan 9-Poly
Up
21.98/30
Tylan 10-Nitride yellow                       Process
testing                             20.09/30
Tylan 11-BPSG-LTO
Up
3.16/30
Tylan 12-FGA Up
Tystar
Up
9.3/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces                  Auto changeover working
well            Currently 625- B(c7) on line




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