From seymour at snf.stanford.edu Mon Dec 1 07:58:07 2003 From: seymour at snf.stanford.edu (Ray Seymour) Date: Mon, 01 Dec 2003 07:58:07 -0800 Subject: Diffusion Morning Report Message-ID: <3FCB650E.C0EA7505@snf.stanford.edu> Morning all, Ted is out today. TEOS temperature control is being monotored Diffusion Date: 12/1/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 13.93/30 Tylan 9-Poly Up 10.68/15 Tylan 10-Nitride Up 21.39/30 Tylan 11-BPSG-LTO Up 8.97/30 Tylan 12-FGA Up Tystar Up 12.9/30 Doped Poly GONE TEOS RED Temp control problems, observation Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 350- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Dec 2 06:27:03 2003 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 02 Dec 2003 06:27:03 -0800 Subject: Diffusion Morning Report 12/02/03 Message-ID: <3FCCA137.1040703@snf.stanford.edu> Good Morning all, Wecome back to all vacationers. Things are looking pretty good this morning. TEOS temp still under observation. Tube 7 is going down for conversion to TEOS. Everything else looking good. Diffusion Date: 12/2/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox down conversion to TEOS Tylan 8-SiGe Up 13.9/30 Tylan 9-Poly Up 10.7/30 Tylan 10-Nitride Up 23.4/30 Tylan 11-BPSG-LTO Up 9.11/30 Tylan 12-FGA Up Tystar Up 12.9/30 Doped Poly GONE TEOS yellow watching temp Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 360- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Dec 3 06:44:51 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 03 Dec 2003 06:44:51 -0800 Subject: Diffusion Morning Report 12/03/03 Message-ID: <3FCDF6E3.7060004@snf.stanford.edu> Good Morning All, Looking Pretty good this morning. Tube number 7 is down for conversion to TEOS. Tylan 1 had O2 leak error from zero drift-we will adjust. Monitoring TEOS temp. Everything else looks good. > Diffusion Date: 12/03/03/2003 > Tube Name/Number Status Comments THICKNESS-Change at > Tylan 1 yellow O2 mfc zero drift > Tylan 2 Up > Tylan 3 Up > Tylan 4 Up > Tylan 5-BBr3 Up > Tylan 6-POCl3 Up > Tylan 7-Dirty Ox Up > Tylan 8-SiGe Up 13.9/30 > Tylan 9-Poly Up 10.7/30 > Tylan 10-Nitride Up 23.5/30 > Tylan 11-BPSG-LTO Up 2.7/30 > Tylan 12-FGA Up > Tystar Up 12.9/30 > Doped Poly GONE > TEOS yellow Temp observation > Tylan 16 N/A > Burn Box Up > ZYGO Up > > GAAS 22 UP > GAAS 23 UP > > SiH4 for furnaces Auto changeover working well Currently 360- > B(c4) on line > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Dec 4 06:25:06 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 04 Dec 2003 06:25:06 -0800 Subject: Diffusion Morning Report 12/04/03 Message-ID: <3FCF43C2.9010002@snf.stanford.edu> Good Morning All, Things are looking pretty good today. Observation on TEOS temp is the only issue. Diffusion Date: 12/04/03/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 13.9/30 Tylan 9-Poly Up 10.7/30 Tylan 10-Nitride Up 23.5/30 Tylan 11-BPSG-LTO Up 9.1/30 Tylan 12-FGA Up Tystar Up 15.9/30 Doped Poly GONE TEOS yellow Temp observation Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 340- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Dec 5 06:36:52 2003 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 05 Dec 2003 06:36:52 -0800 Subject: Diffusion Morning Report 12/05/03 Message-ID: <3FD09804.2070603@snf.stanford.edu> Good Morning all, Looking good this morning. TEOS retro in progress, Burn box going down for clean this morning. Everything else looking good. Diffusion Date: 12/05/03/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox down TEOS Conversion Tylan 8-SiGe Up 13.9/30 Tylan 9-Poly Up 10.8/30 Tylan 10-Nitride Up 25.6/30 Tylan 11-BPSG-LTO Up 12.1/30 Tylan 12-FGA Up Tystar Up 16.4/30 Doped Poly GONE TEOS yellow Temp observation Tylan 16 N/A Burn Box Up Clean today ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 340- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Dec 8 07:02:13 2003 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 08 Dec 2003 07:02:13 -0800 Subject: Diffusion Morning Report 12/08/03 Message-ID: <3FD49275.8020004@snf.stanford.edu> Good Morning all, Looking good this morning. No problems as this message goes out. Bank 2 will be going down soon for TEOS conversion-scavenger replacement. This will affect POCl3, BBr3 and SiGe. the bank will be down for approximately 2 weeks and could go down as early as next week. Nitride will be going down tomorrow for pull and clean. Diffusion Date: 12/8/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox down TEOS Conversion Tylan 8-SiGe Up 13.9/30 Tylan 9-Poly Up 11.2/30 Tylan 10-Nitride Up 25.8/30 Tylan 11-BPSG-LTO Up 14.9/30 Tylan 12-FGA Up Tystar Up 16.4/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 320- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Dec 9 06:25:14 2003 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 09 Dec 2003 06:25:14 -0800 Subject: Diffusion Morning Report 121/09/03 Message-ID: <3FD5DB4A.7080205@snf.stanford.edu> Good Morning all, Looking Good today. Nitride Is down for pull and clean, Teos conversion is moving along. Everything else looking good. Diffusion Date: 12/9/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox down TEOS Conversion Tylan 8-SiGe Up 13.9/30 Tylan 9-Poly Up 11.2/30 Tylan 10-Nitride down Pull and Clean 0/30 Tylan 11-BPSG-LTO Up 14.9/30 Tylan 12-FGA Up Tystar Up 16.4/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 320- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Dec 10 06:53:22 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 10 Dec 2003 06:53:22 -0800 Subject: Diffusion Morning Report 12/10/03 Message-ID: <3FD73362.2060402@snf.stanford.edu> Good Morning all, Looking good this morning. Nitride is reassembled and coated. Needs test. TEOS retro is moving along, getting new pieces every day. Bank 2 will be shut down next Monday or sooner if there are no reservations. Everything else looking good this morning. Diffusion Date: 12/10/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox down TEOS Conversion Tylan 8-SiGe Up 13.9/30 Tylan 9-Poly Up 11.6/30 Tylan 10-Nitride down Pull and Clean 0/30 Tylan 11-BPSG-LTO Up 15.1/30 Tylan 12-FGA Up Tystar Up 16.4/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 320- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Dec 11 06:58:58 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 11 Dec 2003 06:58:58 -0800 Subject: Diffusion Morning Report 12/11/03 Message-ID: <3FD88632.3040804@snf.stanford.edu> Good Morning All, Everything is looking good this morning. Nitride is back up after pull and clean. Bank 2 is going down tomorrow for TEOS conversion. Diffusion Date: 12/11/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox down TEOS Conversion Tylan 8-SiGe Up 14.4/30 Tylan 9-Poly Up 11.6/30 Tylan 10-Nitride Up .1/30 Tylan 11-BPSG-LTO Up 17.3/30 Tylan 12-FGA Up Tystar Up 16.7/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 320- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Dec 12 07:02:44 2003 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 12 Dec 2003 07:02:44 -0800 Subject: Diffusion Morning Report 12/12/03 Message-ID: <3FD9D894.9000201@snf.stanford.edu> Good Morning all, Looking good this morning. Burn box down for clean this morning. Major parts for TEOS conversion are now in house. Bank 2 going down today for TEOS retro today. Diffusion Date: 12/12/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox down TEOS Conversion Tylan 8-SiGe Up 14.4/30 Tylan 9-Poly Up 11.7/30 Tylan 10-Nitride Up 2.0/30 Tylan 11-BPSG-LTO Up 18.8/30 Tylan 12-FGA Up Tystar Up 16.7/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 310- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Dec 15 06:39:17 2003 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 15 Dec 2003 06:39:17 -0800 Subject: Diffusion Morning Report 12/15/03 Message-ID: <3FDDC795.2080307@snf.stanford.edu> Good Morning all, Looking Ok this morning. TEOS bank has all Quartz removed and will soon be coming apart to install new scavenger. Burn box pressure is high this morning will clean. Everything else looks ok. Diffusion Date: 12/15/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 down bank 2 conversion Tylan 6-POCl3 down bank 2 conversion Tylan 7-Dirty Ox down TEOS Conversion Tylan 8-SiGe down bank 2 conversion 0/30 Tylan 9-Poly Up 11.7/30 Tylan 10-Nitride Up 5.9/30 Tylan 11-BPSG-LTO Up 20.6/30 Tylan 12-FGA Up Tystar Up 16.7/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up cleaning this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 310- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Dec 16 06:32:32 2003 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 16 Dec 2003 06:32:32 -0800 Subject: Diffusion Morning Report 12/16/03 Message-ID: <3FDF1780.2000506@snf.stanford.edu> Good Morning All, Looking Good this morning. Bank 2 is down for conversion to TEOS. Tylan 4 has a loader issue- looking into it. Everything else looking good. Epi HCl is getting low and may need to be changed before shutdown. Diffusion Date: 12/16/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 down loader problem Tylan 5-BBr3 down bank 2 conversion Tylan 6-POCl3 down bank 2 conversion Tylan 7-Dirty Ox down TEOS Conversion Tylan 8-SiGe down bank 2 conversion 0/30 Tylan 9-Poly Up 11.7/30 Tylan 10-Nitride Up 7.0/30 Tylan 11-BPSG-LTO Up 21.3/30 Tylan 12-FGA Up Tystar Up 16.7/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up cleaning this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 300- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Dec 17 07:03:21 2003 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 17 Dec 2003 07:03:21 -0800 Subject: Diffusion Morning Report 12/17/03 Message-ID: <3FE07039.3040002@snf.stanford.edu> Good Morning All, Looking good this morning. TEOS retro is moving along. HCL for epi was changed yesterday . Tylan 2 had an MFS 460 alarm for H2/o2 looking into it. Everything else looking good. Diffusion Date: 12/17/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 down h2/o2 alarm Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 down bank 2 conversion Tylan 6-POCl3 down bank 2 conversion Tylan 7-Dirty Ox down TEOS Conversion Tylan 8-SiGe down bank 2 conversion 0/30 Tylan 9-Poly Up 11.7/30 Tylan 10-Nitride Up 8.3/30 Tylan 11-BPSG-LTO Up 21.7/30 Tylan 12-FGA Up Tystar Up 16.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 300- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Dec 18 06:38:46 2003 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 18 Dec 2003 06:38:46 -0800 Subject: Diffusion Morning Report 12/18/03 Message-ID: <3FE1BBF6.1030300@snf.stanford.edu> Good Morning All, Looking Good this morning. TEOS retro moving along nicely-exhaust lines welded and installed yesterday-thanks Bob W and Ray New 6" scavenger installed yesterday. Getting ready for shutdown. Everything else looking good. Diffusion Date: 12/18/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 down bank 2 conversion Tylan 6-POCl3 down bank 2 conversion Tylan 7-Dirty Ox down TEOS Conversion Tylan 8-SiGe down bank 2 conversion 0/30 Tylan 9-Poly Up 12.0/30 Tylan 10-Nitride Up 12.35/30 Tylan 11-BPSG-LTO Up 22.2/30 Tylan 12-FGA Up Tystar Up 16.9/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well Currently 300- B(c4) on line -------------- next part -------------- An HTML attachment was scrubbed... URL: