Diffusion Morning Report

Ray Seymour seymour at snf.stanford.edu
Mon Dec 1 07:58:07 PST 2003


Morning all, Ted is out today. TEOS  temperature control is being
monotored

Diffusion                                      Date: 12/1/2003
Tube Name/Number
Status Comments                              THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe
Up
13.93/30
Tylan 9-Poly
Up
10.68/15
Tylan 10-Nitride
Up
21.39/30
Tylan 11-BPSG-LTO
Up
8.97/30
Tylan 12-FGA Up
Tystar
Up
12.9/30
Doped Poly GONE
TEOS    RED
Temp control problems, observation
Tylan 16 N/A
Burn Box Up
ZYGO Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces                                           Auto
changeover working well  Currently 350- B(c4) on line
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