Diffusion Morning Report 12/02/03

ted berg tberg at snf.stanford.edu
Tue Dec 2 06:27:03 PST 2003

Good Morning all,
    Wecome back to all vacationers.  Things are looking pretty good this 
morning.  TEOS temp still under observation.
Tube 7 is going down for conversion to TEOS.   Everything else looking good.

Diffusion 	Date: 	12/2/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	down 	conversion to TEOS 	 
Tylan 8-SiGe 	Up 	  	13.9/30
Tylan 9-Poly 	Up 	  	10.7/30
Tylan 10-Nitride 	Up 	  	23.4/30
Tylan 11-BPSG-LTO 	Up 	  	9.11/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	12.9/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	watching temp 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 360- B(c4) 
on line

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