Diffusion Morning Report 12/03/03

ted berg tberg at snf.stanford.edu
Wed Dec 3 06:44:51 PST 2003


Good Morning All,
    Looking Pretty good this morning.  Tube number 7 is down for 
conversion to TEOS.  Tylan 1 had O2 leak error from zero drift-we will 
adjust.
Monitoring TEOS temp.  Everything else looks good.

> Diffusion 	Date: 	12/03/03/2003 	 
> Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
> Tylan 1 	yellow 	O2 mfc zero drift 	 
> Tylan 2 	Up 	  	 
> Tylan 3 	Up 	  	 
> Tylan 4 	Up 	  	 
> Tylan 5-BBr3 	Up 	  	 
> Tylan 6-POCl3 	Up 	  	 
> Tylan 7-Dirty Ox 	Up 	  	 
> Tylan 8-SiGe 	Up 	  	13.9/30
> Tylan 9-Poly 	Up 	  	10.7/30
> Tylan 10-Nitride 	Up 	  	23.5/30
> Tylan 11-BPSG-LTO 	Up 	  	2.7/30
> Tylan 12-FGA 	Up 	  	 
> Tystar 	Up 	  	12.9/30
> Doped Poly 	GONE 	  	 
> TEOS 	yellow 	Temp observation 	 
> Tylan 16 	N/A 	  	 
> Burn Box 	Up 	  	 
> ZYGO 	Up 	  	 
>   	  	  	 
> GAAS 22 	UP 	  	 
> GAAS 23 	UP 	  	 
>   	  	  	 
> SiH4 for furnaces 	  	Auto changeover working well 	Currently 360- 
> B(c4) on line
>

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