Diffusion Morning Report 12/08/03

ted berg tberg at snf.stanford.edu
Mon Dec 8 07:02:13 PST 2003


Good Morning all,
    Looking good this morning.  No problems as this message goes out.  
Bank 2 will be going down soon for TEOS conversion-scavenger
replacement.  This will affect POCl3, BBr3 and SiGe.  the bank will be 
down for approximately 2 weeks and could go down as early as
next week.  Nitride will be going down tomorrow for pull and clean.

Diffusion 	Date: 	12/8/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	down 	TEOS Conversion 	 
Tylan 8-SiGe 	Up 	  	13.9/30
Tylan 9-Poly 	Up 	  	11.2/30
Tylan 10-Nitride 	Up 	  	25.8/30
Tylan 11-BPSG-LTO 	Up 	  	14.9/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	16.4/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 320- B(c4) 
on line


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