Diffusion Morning Report 121/09/03

ted berg tberg at snf.stanford.edu
Tue Dec 9 06:25:14 PST 2003


Good Morning all,
    Looking Good today. Nitride Is down for pull and clean, Teos 
conversion is moving along.   Everything else looking good.

Diffusion 	Date: 	12/9/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	down 	TEOS Conversion 	 
Tylan 8-SiGe 	Up 	  	13.9/30
Tylan 9-Poly 	Up 	  	11.2/30
Tylan 10-Nitride 	down 	Pull and Clean 	0/30
Tylan 11-BPSG-LTO 	Up 	  	14.9/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	16.4/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 320- B(c4) 
on line


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20031209/b16de12f/attachment.html>


More information about the diffusion mailing list