Diffusion Morning Report 12/10/03
tberg at snf.stanford.edu
Wed Dec 10 06:53:22 PST 2003
Good Morning all,
Looking good this morning. Nitride is reassembled and coated.
Needs test. TEOS retro is moving along, getting new pieces every day.
Bank 2 will be shut down next Monday or sooner if there are no
reservations. Everything else looking good this morning.
Diffusion Date: 12/10/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox down TEOS Conversion
Tylan 8-SiGe Up 13.9/30
Tylan 9-Poly Up 11.6/30
Tylan 10-Nitride down Pull and Clean 0/30
Tylan 11-BPSG-LTO Up 15.1/30
Tylan 12-FGA Up
Tystar Up 16.4/30
Doped Poly GONE
Tylan 16 N/A
Burn Box Up
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces Auto changeover working well Currently 320- B(c4)
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