Diffusion Morning Report 12/12/03

ted berg tberg at snf.stanford.edu
Fri Dec 12 07:02:44 PST 2003


Good Morning all,
    Looking good this morning. Burn box down for clean this morning.   
Major parts for TEOS conversion are now in house.
Bank 2 going down today for TEOS retro today.

Diffusion 	Date: 	12/12/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-Dirty Ox 	down 	TEOS Conversion 	 
Tylan 8-SiGe 	Up 	  	14.4/30
Tylan 9-Poly 	Up 	  	11.7/30
Tylan 10-Nitride 	Up 	  	2.0/30
Tylan 11-BPSG-LTO 	Up 	  	18.8/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	16.7/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 310- B(c4) 
on line


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20031212/1a7d47d7/attachment.html>


More information about the diffusion mailing list