Diffusion Morning Report 12/15/03

ted berg tberg at snf.stanford.edu
Mon Dec 15 06:39:17 PST 2003

Good Morning all,
    Looking Ok this morning.  TEOS bank has all Quartz removed and will 
soon be coming apart to install new scavenger.
Burn box pressure is high this morning will clean.  Everything else 
looks ok.

Diffusion 	Date: 	12/15/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	down 	bank 2 conversion 	 
Tylan 6-POCl3 	down 	bank 2 conversion 	 
Tylan 7-Dirty Ox 	down 	TEOS Conversion 	 
Tylan 8-SiGe 	down 	bank 2 conversion 	0/30
Tylan 9-Poly 	Up 	  	11.7/30
Tylan 10-Nitride 	Up 	  	5.9/30
Tylan 11-BPSG-LTO 	Up 	  	20.6/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	16.7/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	cleaning this morning 	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 310- B(c4) 
on line

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