Diffusion Morning Report 12/16/03

ted berg tberg at snf.stanford.edu
Tue Dec 16 06:32:32 PST 2003

Good Morning All,
    Looking Good this morning. Bank 2 is down for conversion to TEOS.  
Tylan 4 has a loader issue- looking into it. Everything else
looking good.  Epi HCl is getting low and may need to be changed before 

Diffusion 	Date: 	12/16/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	down 	loader problem
Tylan 5-BBr3 	down 	bank 2 conversion 	 
Tylan 6-POCl3 	down 	bank 2 conversion 	 
Tylan 7-Dirty Ox 	down 	TEOS Conversion 	 
Tylan 8-SiGe 	down 	bank 2 conversion 	0/30
Tylan 9-Poly 	Up 	  	11.7/30
Tylan 10-Nitride 	Up 	  	7.0/30
Tylan 11-BPSG-LTO 	Up 	  	21.3/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	16.7/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	cleaning this morning 	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 300- B(c4) 
on line

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