Diffusion Morning Report 12/17/03

ted berg tberg at snf.stanford.edu
Wed Dec 17 07:03:21 PST 2003


Good Morning All,
    Looking good this morning.  TEOS retro is moving along. HCL for epi 
was changed yesterday . Tylan 2 had an MFS 460 alarm
for H2/o2 looking into it. Everything else looking good.

Diffusion 	Date: 	12/17/2003 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	down 	h2/o2 alarm 	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	down 	bank 2 conversion 	 
Tylan 6-POCl3 	down 	bank 2 conversion 	 
Tylan 7-Dirty Ox 	down 	TEOS Conversion 	 
Tylan 8-SiGe 	down 	bank 2 conversion 	0/30
Tylan 9-Poly 	Up 	  	11.7/30
Tylan 10-Nitride 	Up 	  	8.3/30
Tylan 11-BPSG-LTO 	Up 	  	21.7/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	16.9/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	  	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	Currently 300- B(c4) 
on line



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