From tberg at snf.stanford.edu Mon Feb 3 06:46:09 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 03 Feb 2003 06:46:09 -0800 Subject: Diffusion Morning Report 2/03/03 Message-ID: <3E3E80B0.FB30A7C@snf.stanford.edu> Good Morning All, All is looking good, but we cannot see because coral is down. Nitride is at 21 microns so it will be going down soon for pull and Clean. Diffusion Date: 1/30/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 13.3/30 Tylan 9-Poly Up .7/30 Tylan 10-Nitride Up 21.4/30 Tylan 11-BPSG-LTO Up 15.5/30 Tylan 12-FGA Up Tystar up 15.6/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 590 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From srivdevan at yahoo.com Tue Feb 4 05:38:32 2003 From: srivdevan at yahoo.com (v srivathsan) Date: Tue, 4 Feb 2003 05:38:32 -0800 (PST) Subject: Diffusion Morning Report 2/03/03 Message-ID: <20030204133832.69363.qmail@web21309.mail.yahoo.com> Dear Anu, I heard that u with other friends gave an outlook about gre etc. My friends found it very useful and I also gathered a lot of infoms from that. Right coming to my point, I ve just visited stanford and rice univs and i am collecting details. Anyway your suggestion is needed. I think I am troubling you too much. But I find no other way. Reg gre I am now in wordlist 5 in barron. Shall i continue with the same pace or shall i speed up. I expect ur mail as early as possible. Bye, V.Srivathsan __________________________________________________ Do you Yahoo!? Yahoo! Mail Plus - Powerful. Affordable. Sign up now. http://mailplus.yahoo.com From tberg at snf.stanford.edu Tue Feb 4 06:36:15 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 04 Feb 2003 06:36:15 -0800 Subject: Diffusion Morning report 2/04/03 Message-ID: <3E3FCFDF.545831C@snf.stanford.edu> Good morning all, Everything still looks good coral is still down. Diffusion Date: 2/3/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.9/30 Tylan 9-Poly Up 1.33/30 Tylan 10-Nitride Up 21.4/30 Tylan 11-BPSG-LTO Up 18.3/30 Tylan 12-FGA Up Tystar up 18.6/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Feb 4 06:39:03 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 04 Feb 2003 06:39:03 -0800 Subject: Diffusion Morning Report02/04/03 Message-ID: <3E3FD087.72ACF79C@snf.stanford.edu> Good Morning all, Everything still looks good, coral is still down. Diffusion Date: 2/3/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.9/30 Tylan 9-Poly Up 1.33/30 Tylan 10-Nitride Up 21.4/30 Tylan 11-BPSG-LTO Up 18.3/30 Tylan 12-FGA Up Tystar up 18.6/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Feb 6 09:22:04 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 06 Feb 2003 09:22:04 -0800 Subject: Diffusion Morning report 2/06/03 Message-ID: <3E4299BB.D8AF7281@snf.stanford.edu> Good morning all, Coral still down. Reserved on Paper all CVD tubes for burn box clean tomorrow morning. LTO to go down this afternoon for clean. All else looks good. Diffusion Date: 2/6/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.9/30 Tylan 9-Poly Up 1.52/30 Tylan 10-Nitride Up 23.64/30 Tylan 11-BPSG-LTO Up 19.01/30 Tylan 12-FGA Up Tystar up 19.1/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Feb 7 06:40:04 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 07 Feb 2003 06:40:04 -0800 Subject: Diffusion Morning 2/07/03 Message-ID: <3E43C544.F00D45B6@snf.stanford.edu> Good Morning all, LTO is getting cleaned, Burn box clean this morning. Everything else looks OK Diffusion Date: 2/6/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.9/30 Tylan 9-Poly Up 1.7/30 Tylan 10-Nitride Up 24.8/30 Tylan 11-BPSG-LTO Down -Pull and clean 0/30 Tylan 12-FGA Up Tystar up 19.1/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Feb 10 07:30:16 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 10 Feb 2003 07:30:16 -0800 Subject: Diffusion Morning Report 2/10/03 Message-ID: <3E47C588.AFC855F4@snf.stanford.edu> Good morning all, Coral and E-mail are back up thanks John and company, FGA had a zero problem its ok now. Diffusion Date: 2/10/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.9/30 Tylan 9-Poly Up 1.7/30 Tylan 10-Nitride Up 26.1/30 Tylan 11-BPSG-LTO Up Pull and Clean completed on Friday 3.48/30 Tylan 12-FGA Up Tystar up 19.1/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 570 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Feb 11 08:13:18 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 11 Feb 2003 08:13:18 -0800 Subject: Diffusion Morning Report 2/11/03 Message-ID: <3E49211E.C4FAD5D6@snf.stanford.edu> Good morning all, Lots of things going on this morning. Numerous wet benches down for drain repair, and Thermco drain tie in. BPSG had a broken TC sheath which was replaced. Diffusion Date: 2/11/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 6.9/30 Tylan 9-Poly Up 1.7/30 Tylan 10-Nitride Up 26.1/30 Tylan 11-BPSG-LTO Down leak-broken TC sheath 6.48/30 Tylan 12-FGA Up Tystar up 19.1/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 570 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Feb 12 06:35:54 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 12 Feb 2003 06:35:54 -0800 Subject: Diffusion Morning Report 02/12/03 Message-ID: <3E4A5BCA.5E635C9A@snf.stanford.edu> Good Morning all, All is looking good, Nitride is going down for pull and clean and Ammonia cylinder change. Sink are all back to normal. Diffusion Date: 2/12/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 7.04/30? Tylan 9-Poly Up 1.7/30 Tylan 10-Nitride Up Going down for pull and clean and NH3 cylinder 26.1/30 Tylan 11-BPSG-LTO Up 7.48/30 Tylan 12-FGA Up Tystar up 19.1/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 570 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Feb 13 06:46:40 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 13 Feb 2003 06:46:40 -0800 Subject: Diffusion Morning Report 02/13/03 Message-ID: <3E4BAFD0.C383DE1C@snf.stanford.edu> Good morning all, All is looking OK Nitride is going back together. all else looks ok. Diffusion Date: 2/13/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 7.04/30? Tylan 9-Poly Up 2.35/30 Tylan 10-Nitride Down down for pull and clean and NH3 cylinder 0/30 Tylan 11-BPSG-LTO Up 7.73/30 Tylan 12-FGA Up Tystar up 19.1/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 570 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Feb 14 07:02:27 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 14 Feb 2003 07:02:27 -0800 Subject: Diffusion Morning Report 02/14/03 Message-ID: <3E4D0503.49D6C4C0@snf.stanford.edu> Happy Valentines day all, Everything looking good Nitride is back up. Burn box cleaned this morning. Diffusion Date: 2/14/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 7.04/30? Tylan 9-Poly Up 2.35/30 Tylan 10-Nitride Up pull and clean and NH3 cylinder COMPLETED .35/30 Tylan 11-BPSG-LTO Up 7.73/30 Tylan 12-FGA Up Tystar up 19.4/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 570 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Feb 18 07:06:43 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 18 Feb 2003 07:06:43 -0800 Subject: Diffusion Morning report 02/18/03 Message-ID: <3E524C03.C54D8C1D@snf.stanford.edu> Good morning all, Everything looking good this morning-Ray out today. Diffusion Date: 2/18/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 7.04/30? Tylan 9-Poly Up 4.2/30 Tylan 10-Nitride Up 4.35/30 Tylan 11-BPSG-LTO Up 12.5/30 Tylan 12-FGA Up Tystar up 19.4/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 560 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Feb 19 07:29:57 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 19 Feb 2003 07:29:57 -0800 Subject: Diffusion Morning Report 02/19/03 Message-ID: <3E53A2F5.D452020F@snf.stanford.edu> Good morning all, All is looking good, repaired connectoin on Center zone TC on Tylan 4 looks good now. Diffusion Date: 2/18/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Repaired CZ TC connection OK now Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 7.04/30? Tylan 9-Poly Up 4.2/30 Tylan 10-Nitride Up 4.35/30 Tylan 11-BPSG-LTO Up 13.6/30 Tylan 12-FGA Up Tystar up 19.4/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 560 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Feb 20 07:17:20 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 20 Feb 2003 07:17:20 -0800 Subject: Diffusion Morning report 2/20/03 Message-ID: <3E54F180.B2A51784@snf.stanford.edu> Good morning all, BPsg has broken injector and sheath, Mike is changing now. Nitride has clogged soft pump valve-Ray is cleaning now. Diffusion Date: 2/20/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 7.04/30? Tylan 9-Poly Up 4.2/30 Tylan 10-Nitride Down dirty soft pump valve-won't vent 6.8/30 Tylan 11-BPSG-LTO Down broken TC and injector 14.8/30 Tylan 12-FGA Up Tystar up 19.4/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 560 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Feb 21 06:49:54 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 21 Feb 2003 06:49:54 -0800 Subject: Diffusion Morning Report 02/21/03 Message-ID: <3E563C92.6BA1AF36@snf.stanford.edu> Good Morning all, Burn box down for weekly clean and Thermco tie ins. All else looking good Diffusion Date: 2/21/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 7.04/30? Tylan 9-Poly Up 4.7/30 Tylan 10-Nitride Up 7.9/30 Tylan 11-BPSG-LTO Up 15.5/30 Tylan 12-FGA Up Tystar up 19.4/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 560 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Feb 24 06:42:50 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 24 Feb 2003 06:42:50 -0800 Subject: Diffusion Morning Report 2/24/03 Message-ID: <3E5A2F6A.B8E8C6AC@snf.stanford.edu> Good morning all, Everything is looking good, burn box is a bit high after 2 microns of poly,5 micron s of nitride and 3 microns of LTO over the weekend. Diffusion Date: 2/24/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 7.04/30? Tylan 9-Poly Up 6.8/30 Tylan 10-Nitride Up 12.1/30 Tylan 11-BPSG-LTO Up 18.3/30 Tylan 12-FGA Up Tystar up 19.4/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 560 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Feb 25 06:37:16 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 25 Feb 2003 06:37:16 -0800 Subject: Diffusion Morning report 2/25/03 Message-ID: <3E5B7F9C.6CDDAFE4@snf.stanford.edu> Good Morning All, Everything looking pretty good. Burn box clean this morning. Diffusion Date: 2/25/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 7.04/30? Tylan 9-Poly Up 6.8/30 Tylan 10-Nitride Up 12.6/30 Tylan 11-BPSG-LTO Up 18.6/30 Tylan 12-FGA Up Tystar up 19.4/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 540 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Feb 26 06:28:56 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 26 Feb 2003 06:28:56 -0800 Subject: Diffusion Morning Report 2/26/03 Message-ID: <3E5CCF28.D2A38A5D@snf.stanford.edu> Good Morning all, Looking good no issues at this time. Diffusion Date: 2/26/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 7.04/30? Tylan 9-Poly Up 7.3/30 Tylan 10-Nitride Up 13.2/30 Tylan 11-BPSG-LTO Up 21/30 Tylan 12-FGA Up Tystar up 22.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 520 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From latta at snf.stanford.edu Wed Feb 26 09:46:09 2003 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 26 Feb 2003 09:46:09 -0800 Subject: Tystar use and clean In-Reply-To: <3E5CCF28.D2A38A5D@snf.stanford.edu> References: <3E5CCF28.D2A38A5D@snf.stanford.edu> Message-ID: <3E5CFD61.1090908@snf.stanford.edu> Team Furnace- I sent email to the Intel fellows who want to use the tystar for a non-standard material (Ge). Both guys have spoken to me and their game plan is as follows; Today they are bonding wafers which have polt already deposted on them from an outside vendor. On Fri they will know if that bond worked. If it worked, they will be 'very interested' in a tystar dep. Probably early to mid-next week. Updates forth coming.... Nancy -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu From tberg at snf.stanford.edu Thu Feb 27 06:40:48 2003 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 27 Feb 2003 06:40:48 -0800 Subject: Diffusion Morning report 02/27/03 Message-ID: <3E5E2370.A4808625@snf.stanford.edu> Good Morning all, All is looking good. a few issues in sink land. Diffusion Date: 2/27/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 7.04/30? Tylan 9-Poly Up 7.6/30 Tylan 10-Nitride Up 14.35/30 Tylan 11-BPSG-LTO Up 21.3/30 Tylan 12-FGA Up Tystar up 22.5/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up ZYGO Up installed CDrw GAAS 22 UP GAAS 23 UP SiH4 for furnaces Change at 100PSI Currently 515 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri Feb 28 07:15:33 2003 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 28 Feb 2003 07:15:33 -0800 Subject: Diffusion Morning report 2/28/03 Message-ID: <3E5F7D15.B8F916DB@snf.stanford.edu> Date: 2/28/2003 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Yellow Tylan 2 UP Tylan 3 Yellow Tylan 4 Down Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-Dirty Ox Up Tylan 8-SiGe Up 8.0/30 Tylan 9-Poly Up 8.07/30 Tylan 10-Nitride Up 14.99/30 Tylan 11-BPSG-LTO Up 21.97/30 Tylan 12-FGA Up Tystar Up 25.46/30 Doped Poly Down TEOS yellow Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO UP GAAS 22 UP GAAS 23 UP -------------- next part -------------- An HTML attachment was scrubbed... URL: