Diffusion Morning Report 2/03/03

Ted Berg tberg at snf.stanford.edu
Mon Feb 3 06:46:09 PST 2003


Good Morning All,
    All is looking good, but we cannot see because coral is down.
Nitride is at 21 microns so it will be going down soon for pull and
Clean.

Diffusion Date: 1/30/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   13.3/30
Tylan 9-Poly Up   .7/30
Tylan 10-Nitride Up   21.4/30
Tylan 11-BPSG-LTO Up   15.5/30
Tylan 12-FGA Up
Tystar up   15.6/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently  590 PSI


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