Diffusion Morning Report02/04/03

Ted Berg tberg at snf.stanford.edu
Tue Feb 4 06:39:03 PST 2003


Good Morning all,
    Everything still looks good, coral is still down.

Diffusion Date: 2/3/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.9/30
Tylan 9-Poly Up   1.33/30
Tylan 10-Nitride Up   21.4/30
Tylan 11-BPSG-LTO Up   18.3/30
Tylan 12-FGA Up
Tystar up   18.6/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 580 PSI

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20030204/532544ea/attachment.html>


More information about the diffusion mailing list