Diffusion Morning report 2/06/03

Ted Berg tberg at snf.stanford.edu
Thu Feb 6 09:22:04 PST 2003


Good morning all,
    Coral still down. Reserved on Paper all CVD tubes for burn box clean
tomorrow morning.  LTO to go down this afternoon for clean. All else
looks good.

Diffusion Date: 2/6/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up  6.9/30
Tylan 9-Poly Up   1.52/30
Tylan 10-Nitride Up   23.64/30
Tylan 11-BPSG-LTO Up   19.01/30
Tylan 12-FGA Up
Tystar up   19.1/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 580 PSI

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