Diffusion Morning 2/07/03

Ted Berg tberg at snf.stanford.edu
Fri Feb 7 06:40:04 PST 2003

Good Morning all,
    LTO is getting cleaned, Burn box clean this morning. Everything else
looks OK

Diffusion Date: 2/6/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.9/30
Tylan 9-Poly Up   1.7/30
Tylan 10-Nitride Up   24.8/30
Tylan 11-BPSG-LTO Down -Pull and clean 0/30
Tylan 12-FGA Up
Tystar up   19.1/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw


SiH4 for furnaces   Change at 100PSI Currently 580 PSI

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