Diffusion Morning Report 2/10/03

Ted Berg tberg at snf.stanford.edu
Mon Feb 10 07:30:16 PST 2003


Good morning all,
    Coral and E-mail are back up thanks John and company, FGA had a zero
problem its ok now.

Diffusion Date: 2/10/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.9/30
Tylan 9-Poly Up   1.7/30
Tylan 10-Nitride Up   26.1/30
Tylan 11-BPSG-LTO Up Pull and Clean completed on Friday 3.48/30
Tylan 12-FGA Up
Tystar up   19.1/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 570 PSI

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