Diffusion Morning Report 2/11/03

Ted Berg tberg at snf.stanford.edu
Tue Feb 11 08:13:18 PST 2003


Good morning all,
    Lots of things going on this morning.  Numerous wet benches down for
drain repair, and Thermco drain tie in. BPSG had a broken TC sheath
which was replaced.

    Diffusion Date: 2/11/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   6.9/30
Tylan 9-Poly Up   1.7/30
Tylan 10-Nitride Up   26.1/30
Tylan 11-BPSG-LTO Down leak-broken TC sheath 6.48/30
Tylan 12-FGA Up
Tystar up   19.1/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 570 PSI

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