Diffusion Morning Report 02/12/03

Ted Berg tberg at snf.stanford.edu
Wed Feb 12 06:35:54 PST 2003

Good Morning all,
    All is looking good, Nitride is going down for pull and clean and
Ammonia cylinder change. Sink are all back to normal.

Diffusion Date: 2/12/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   7.04/30?
Tylan 9-Poly Up   1.7/30
Tylan 10-Nitride Up Going down for pull and clean and NH3 cylinder
Tylan 11-BPSG-LTO Up   7.48/30
Tylan 12-FGA Up
Tystar up   19.1/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw


SiH4 for furnaces   Change at 100PSI Currently 570 PSI

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