Diffusion Morning Report 02/13/03

Ted Berg tberg at snf.stanford.edu
Thu Feb 13 06:46:40 PST 2003


Good morning all,
    All is looking OK Nitride is going back together. all else looks ok.

Diffusion Date: 2/13/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   7.04/30?
Tylan 9-Poly Up   2.35/30
Tylan 10-Nitride Down  down for pull and clean and NH3 cylinder 0/30
Tylan 11-BPSG-LTO Up   7.73/30
Tylan 12-FGA Up
Tystar up   19.1/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 570 PSI

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20030213/be073c6b/attachment.html>


More information about the diffusion mailing list