Diffusion Morning Report 02/19/03

Ted Berg tberg at snf.stanford.edu
Wed Feb 19 07:29:57 PST 2003


 Good morning all,
    All is looking good, repaired connectoin on Center zone TC on Tylan
4 looks good now.

Diffusion Date: 2/18/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up Repaired CZ TC connection OK now
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   7.04/30?
Tylan 9-Poly Up   4.2/30
Tylan 10-Nitride Up   4.35/30
Tylan 11-BPSG-LTO Up   13.6/30
Tylan 12-FGA Up
Tystar up   19.4/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 560 PSI

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