Diffusion Morning report 2/20/03

Ted Berg tberg at snf.stanford.edu
Thu Feb 20 07:17:20 PST 2003

Good morning all,
    BPsg has broken injector and sheath, Mike is changing now.  Nitride
has clogged soft pump valve-Ray is cleaning now.

Diffusion Date: 2/20/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   7.04/30?
Tylan 9-Poly Up   4.2/30
Tylan 10-Nitride Down dirty soft pump valve-won't vent 6.8/30
Tylan 11-BPSG-LTO Down broken TC and injector 14.8/30
Tylan 12-FGA Up
Tystar up   19.4/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw


SiH4 for furnaces   Change at 100PSI Currently 560 PSI

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