Diffusion Morning Report 02/21/03

Ted Berg tberg at snf.stanford.edu
Fri Feb 21 06:49:54 PST 2003


Good Morning all,
    Burn box down for weekly clean and Thermco tie ins. All else looking
good

Diffusion Date: 2/21/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   7.04/30?
Tylan 9-Poly Up   4.7/30
Tylan 10-Nitride Up   7.9/30
Tylan 11-BPSG-LTO Up   15.5/30
Tylan 12-FGA Up
Tystar up   19.4/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up Cleaned this morning
ZYGO Up installed CDrw

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces   Change at 100PSI Currently 560 PSI

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