Diffusion Morning Report 2/24/03

Ted Berg tberg at snf.stanford.edu
Mon Feb 24 06:42:50 PST 2003

Good morning all,
    Everything is looking good, burn box is a bit high after 2 microns
of poly,5 micron s of nitride and 3 microns of LTO over the weekend.

Diffusion Date: 2/24/2003
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-Dirty Ox Up
Tylan 8-SiGe Up   7.04/30?
Tylan 9-Poly Up   6.8/30
Tylan 10-Nitride Up   12.1/30
Tylan 11-BPSG-LTO Up   18.3/30
Tylan 12-FGA Up
Tystar up   19.4/30
Doped Poly Down
TEOS yellow
Tylan 16 N/A
Burn Box Up
ZYGO Up installed CDrw


SiH4 for furnaces   Change at 100PSI Currently 560 PSI

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